Same. I'm pretty confident we can, though. Not to take too much away from ASML who has done a good job in the time since, but don't forget that the US invented EUV with taxpayer money and basically only allowed ASML(and a company they bought) access. And the rest, as they say, is history.
EUV the concept is obvious. You want higher resolution, you need shorter wavelengths. But there are many devils in many details, and the relatively tiny US EUV program didn't do a whole lot about them. So no, EUV is not mainly a US development.
I'm not sure how true that is. The EUV concept was drawn up in the 90s, and the program was designed specifically to do further research to overcome technical hurdles. Multiple companies were interested in licensing this research, but all but ASML were blocked. Is it no coincidence that they are the only ones who achieved it?
In fairness, I don't know all the inner workings of what was already in place and how much more they had to do initially, it just feels peculiar that the denied interested parties(large Japanese companies) never achieved it.
